Congratulations to Master's graduate Yi Yang (R12) and Ph.D. student Cheng-Feng Liu (D12), supervised by Prof. Chien-Fang Ding, for publishing their latest research in the internationally renowned journal Applied Surface Science (5-yr IF=6.3, Rank 2/21[9.5%] in MATERIALS SCIENCE, COATINGS & FILMS).
"Laser-driven surface oxidation of 4H-SiC for tailored enhancement of machinability"
This study employs laser-driven surface oxidation technology to improve the machinability of 4H-SiC. By inducing localized thermal oxidation on the material surface using a fiber laser, a thin SiO₂ layer with lower hardness is formed, significantly reducing the original surface strength. Compared to ultrafast pulsed lasers, this technique offers lower costs and higher maintainability, making it suitable for large-scale manufacturing. The research utilizes finite element analysis to simulate the transient thermal behavior during laser scanning and combines machine learning to establish predictive models for the relationships between processing parameters, etch depth, and surface roughness. The results demonstrate that laser oxidation treatment can effectively enhance the subsequent processing efficiency of 4H-SiC and reduce grinding wheel wear, highlighting its application potential in semiconductor manufacturing processes.
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